Probe Arms for RF Probing
Image shows RF probe arms attached to full-size positioners. The arms allow you to cover all 4 quadrants of a wafer with the positioners arranged on left and right sides (West and East) of the chuck. Also note how much longer the N-S (North-South) arms are to get to the center of the chuck.
At least a mid-size positioner is needed to support these long arms.
Smaller image at right shows probe arms attached to our mid-size in-line positioners (PSEM050M).
We have one customer using the shorter probe arms (E-W) with positioner part # PSEM700V. A counter weight stops the positioner from toppling over when vacuum is removed.
For ordering probe heads see these pages:
RF probe heads
Multi Contact heads
Please contact us if you need something special.