Motorized Micro Positioner
 Posted on March 06, 2012
 
CAD
 
 
US$
 
 
Motorization of micropositioners offers these advantages:
  • Higher resolution than what is possible with manual control
  • Ability to get back to exact earlier position
  • Numerical indication of exact position of X, Y, Z axis
  • Repeat execution of a group of movements under software control
What is needed in addition to the motorized positioner:
  • Controller with power supply and cabling
  • A PC with Windows, Linux, or even good old DOS only
  • CNC software, low cost for Windows ($175), zero cost for Linux and DOS
How can I create program code?
The bulk of the CNC code - 80% or more - can be created in a simple graphical way.
You will have a scaled drawing of your device under test in your electronic CAD program. A dxf file of this data set can be brought into almost any mechanical CAD program. The actual control codes for the tip movement needed is then just a collection of lines created on one or more different layers. Important is that there are no breaks between the endpoints of the various lines representing your tip movement. These lines from a single layer or a group of layers are then exported as a dxf file. Low or zero cost readily available software converts that to machine code. And there is the bulk of your control code, 80% or more.
Then you will need to additional code for example to insert breaks at various measurement points. Also You will need additional control commands for the z-axis. Only at measurepoints you want the probe tip to contact the wafer. So you will have a startup condition where the tip is some anount above the wafer like for example 500 micron. At your points of interest you need to lower the probe tip to the wafer level + needed overdrive.
Once you have finalized the initial version of your control program you can run it in your CNC program, initially without turning the controller on. A graphical representation of the various movements will alert you on major mistakes. After fixing them you could run a simulation with the controller turned but no actual wafer on the chuck or at a higher z-axis level.
Eventually you will fully debugged control code and start with actual measurements.
Please contact us if you need something special.
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Description
Part # / Price
Motorized Micro Positioners
 
Ball Bearing MICROPOSITIONER, magnetic Base, 100TPI, 3 axis motorized
PTSMM050M    CAD1668   US$1645
Ball Bearing MICROPOSITIONER, vacuum Base, 100TPI, 3 axis motorized
PTSMM050V    CAD1772   US$1748
Ball Bearing MICROPOSITIONER, left handed, magnetic Base, 100TPI, 3 axis motorized
PTSMM005ML   CAD2290  US$2259
Ball Bearing MICROPOSITIONER, left handed, vacuum Base, 100TPI, 3 axis motorized
PTSMM005VL   CAD2290  US$2259
Ball Bearing MICROPOSITIONER, right handed, magnetic Base, 100TPI , 3 axis motorized
PTSMM005MR     CAD2290   US$2259
Ball Bearing MICROPOSITIONER, right handed, vacuum Base, 100TPI , 3 axis motorized
PTSMM005VR   CAD2290  US$2259
Control System for motorized positioner
 
3-axis controller with power supply and cabling in metal case
PTSCS312     CAD668   US$659
4-axis controller with power supply and cabling in metal case
PTSCS412     CAD709   US$699
5-axis controller with power supply and cabling in metal case
PTSCS512     CAD749   US$739
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