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Calibration Substrates,
organized by calibration type, pad size, footprint, pitch:

This line of CALIBRATION SUBSTRATES allows the user to calibrate any microwave probehead at the probe tip. The underlying principal of the calibration of a measurement system is to provide accurate known standards to which the measurement system can be connected. Each calibration substrate contains highly precise elements for calibrating out the unavoidable errors and losses in a microwave network analyzer, its associated cabling, and the microwave probe to ensure accurate on-wafer testing.

  • Supports Precise SOLT, LRL/TRL, and LRM/TRM calibrations
  • Includes CalKit software for easy loading to Network Analyzer
  • Wide pitch range from 30 to 2,540 microns
  • Suitable for all Picoprobes® from DC to 220 GHz
  • Available for GS, SG, GSG Footprints
  • Convenient alignment structures
  • Individually tested and trimmed to exacting standards
  •  

 

Accurate, easy to use calibration substrates, calibration coefficients, and detailed instructions allow you to correct the measurement system (network analyzer + cabling + probe) whenever it produces a reading different than the standard.

The typical elements for calibrating a microwave measurement system consists of opens, shorts, matched loads, and throughs. These four elements have electrical characteristics that are very different from one another so that each element contributes an important part to the overall calibration process. In principle any set of standards could be employed, however, the more identical the standards are, the less accurate the calibration process becomes, which in turn results in inaccurate on-wafer testing. Precision crafted calibration substrates, when properly used, assure you of accurate on-wafer test results.

How to select the correct calibration substrate for your probing application(s):

  1. Identify your probe's footprint and pitch (tip spacing)
  2. Determine which calibration type is appropriate for your application (SOLT, LRL/TRL, or LRM/TRM)*
  3. Using the Calibration Substrate Selection Guide, choose the calibration substrate which matches your probe's footprint, recommended pitch range, and your preferred calibration type.

 

Calibration Substrate Selection Guide

Calibration
Substrate

Pad Size (microns)

Calibration
Types Supported

Footprint

Pitch Range
Recommeded (Ám)

Pitch Range
Acceptable (Ám)

PSGCS5

50 x 50

SOLT, LRL, LRM

GSG

75 - 250

75 - 250

PSGCS9

100 x 100

SOLT, LRL, LRM

GSG

250 - 600

150 - 600

PSGCS10

150 x 150

SOLT, LRM

GSG

600 -1250

225 -1250

PSGCS18

300 x 300

SOLT, LRM

 

GSG

1250 - 2540

500 - 2540

Table 1

PSGCS8

50 x 50
100 x 100
150 x 150

SOLT, LRM

 

GS, SG

50 - 200

50 - 300

PSGCS14

50 x 50

SOLT, LRM

 

GS, SG

200 - 400

150 - 600

PSGCS11

50 x 50

SOLT, LRM

 

GS, SG

400 - 1250

175 - 1250

PSGCS15

50 x 50

SOLT, LRM

 

GS, SG

750 - 2540

450 - 2540

Table 2

Special Calibration Substrate Designed For Use Above 110 GHz

PSGCS15

25 x 25

SOLT, LRL, LRM

 

GSG

40 - 150 (SOLT)
30 - 150
(LRL)

40 - 150

Table 3

SOLT = Short-Open-Load-Through
LRL = Line-Reflect-Line (Which is equivalent to TRL = Through-Reflect-Line)
LRM = Line-Reflect-Match (Which is equivalent to TRM = Through-Reflect-Match)

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