Buiding Blocks for Probe Stations or build your own specialized test fixture.

Posted on November 11, 2014


6in vacuum chuck + stage for custom probe station or test fixture







150 mm / 6" Vacuum Chuck and Stage assembly for probe station as used on BD-6, see probe station page. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue.
Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 6", 4", 3" wafers. Vacuum pump will be needed and is not included in this offer.
For wafers, 6" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
150 mm / 6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta: Coarse adjustment by 30 degrees
125 x 125 mm mounting holes

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1 m accuracy spindles
Net weight: 19 kg or 42 lbs
Operational Requirements: 7 liter/min 250 mmHg vacuum supply

1 year manufacturer warranty

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