Buiding Blocks for Probe Stations or build your own specialized test fixture.

Posted on November 11, 2014

PSECKPE6

6in vacuum chuck + stage for probe station, Z axis adjust

xxc

5640

 

or

$

4898

150 mm / 6" Vacuum Chuck and Stage assembly for probe station. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue. Picture shows 4" version.
Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 6", 4", 2" wafers. Vacuum pump will be needed and is not included in this offer.
Features:
Ideal for small wafers, 6" or less
Chuck stage front and side adjustable
Chuck theta coarse adjustment
Z axis adjustment with micrometer
Backlash-free movement
Specifications:
6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta: coarse adjustment up to 30 degrees
Z-axis fine adjustment with micrometer.

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$

4898

3995

3129

AUD

5720

Rs307376

Exchange rates for prices in Euro, GBP, AUD, Rs were valid on posting date, will be adjusted to invoice date if necessary.

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1 turn (50 units) equals 0.25 mm, 1 unit is 5 m
75 x 75 mm mounting holes
Total height from mounting plane to top of chuck 140 mm / 5.5" 2 mm
Net weight: 5.5 kg or 12 lbs
Operational Requirements: 7 liter/min 250 mmHg vacuum supply

1 year manufacturer warranty

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