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 Posted on June 21, 2016
 
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6” (150 mm) Probe Stations, bare, and as kit, with or without microscope.
On 150 mm or 6” probe stations the scope is typically a compound microscope.
When probing the smaller features of 150 mm wafers a stereo zoom scope is not any more adequate. A compound scope and fiberoptic illumination is a better option for magnification above 150 - 200X.
Mitutoyo has the perfect solution with the Finescope, albeit at a pretty elevated price. See Industrial Scopes for
Finescope (above $10K) solutions and lower cost alternatives like the Motic PSM-1000 (above $8K) or Meiji’s FU3054 (around $4K) based solutions. Or if you would like a zoom scope then Qioptiq’s AZoom 2 and Micro are perfevct choices. If budget is an important consideration then a zoom scope based on Meiji parts wins hand down
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Description
Part # / Price
6in Probe Station kit, scope not included, 2 micropositioners, probe holders/tips
PSESLC6      CAD12166  US$9220
6in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders and 1 box of tips
PSESLC6M     CAD12968   US$9828
6in Probe Station kit, scope not included, 2 large micropositioners, probe holders and 1 box of tips
PSESLC6L     CAD14439   US$10943
150mm/6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips
PSESLC6MM0520K     CAD19951   US$15120
6in Probe Station kit with Meiji Techno compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips
PSESLC6LM0520K     CAD21425   US$16237
6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 mid-size micropositioners, probe holders and 1 box of tips
PSESLC6MMI0520     CAD30726   US$23286
6in Probe Station kit with Mitutoyo FS70 compound microscope, 5X and 20X LWD objectives, 2 large micropositioners, probe holders and 1 box of tips
PSESLC6LMI0520     CAD53152   US$40282
6in Probe Station BD-6, scope not included, 2 micropositioners, probe holders/tips
PSESBD6      CAD21075  US$15972
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