Probe Stations for 4 (100 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on May 25, 2015

100mm / 4in Probe Station kit, no scope, 2 micropositioners, probe holders/tips

PSESKP4MP      CAD8917  US$7048

Probe Station kit for use with 4" wafers, no microscope, supply your own, 1 pair of micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units. A 6" version is available.
Compact size, 320 wide x 320 deep x 280 to 460 mm high (12.5" x 12.5" x 11" to 18""), that includes the scope
Low weight, 59 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
2 year manufacturer warranty








369642 py6






UAH 150611




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No scope included

4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Z adjustment by moving platen up or down
Platen allows placement of up to 8 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height with scope installed: 460 mm or 18.1"
Net weight of base: 17 kg or 38 lbs

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