Probe Stations for 4 (100 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on May 25, 2015

100mm / 4in Probe Station bare, wide platen bars, no scope manipulators tips

PSESPE4BW      CAD3858  US$3049

MINI Probe Station, bare, for use with 100 mm / 4" or smaller wafers, extra wide and longer platen bars, no microscope, illumination or micropositioners etc. Supply your own stereo zoom scope, manipulators, probe holders and tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
Compact size, 320 wide x 320 deep x 280 to 400 mm high (12.5" x 12.5" x 11" to 16"), height depends on scope mounting pole adjustment
Low weight, 53 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
Wide platen bars (50 x 80 mm)
2 year manufacturer warranty








159909 py6






UAH 65155




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Optional: Platen bars for back and front (north/south)

4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies 
Left and right platen allow placement of up to 6 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height without scope: adjustable between 280 and 400 mm or 11"to 16", with scope at working distance 450 mm (17.72") at top of trinocular tube
Net weight of assembly, includes scope and other parts in kit: 22 kg or 49 lbs
2 platen bars 50 x 80 x 180 mm long

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