Probe Stations for 4 (100 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on May 25, 2015

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 mid size micropositioners, probe holders/tips

PSESKP4CMMK0520K     CAD18788  US$14849

Probe Station kit for use with 4" wafers, complete with Meiji Techno Stereo Zoom microscope with illumination, 1 pair of micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units. A 6" version is available.
Features:
Compact size, 320 wide x 320 deep x 280 to 500 mm high (12.5" x 12.5" x 11" to 19.7"), that includes the scope
Low weight, 105 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
2 year manufacturer warranty

$

14849

1389 8

9882

AUD

19534

Rs971114

778776 py6

CAD

18788

 

 

 

UAH 317313

CHF

 

1622 6

Exchange rates for prices in Euro, GBP, AUD, Rs, CAD, RUB, UAH were valid on posting date, will be adjusted to invoice date if necessary.
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Microscope:
type: Compound
Focus block with coarse and fine adjustment
Trinocular erect image head with depolarizer
Quuadruple nosepiece for objectives with 26 mm Mitutoyo thread
10X widefield eyepieces with high eyepoint,  field no 22 mm
Plan APO 5x NA=

Specifications:
4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Z adjustment by moving platen up or down
Platen allows placement of up to 8 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height with scope installed: 460 mm or 18.1"
Net weight of base: 17 kg or 38 lbs

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