Probe Stations for 4 (100 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on May 25, 2015

Complete 100mm / 4in Probe Station kit with Meiji based compound scope, 5x and 20X LWD objective, 2 full size micropositioners, probe holders/tips

PSESPE4CWLMK0520     CAD16610  US$13128

MINI Probe Station kit with wide platen bars for use with 100 mm / 4" wafers, complete with compound microscope and fiber optic illumination, 5X and 20X LWD objectives, 1 pair of large micropositioners with 1 m resolution, probe holders, and 1 box of probe tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
Compact size, 320 wide x 320 deep x 280 to 485 mm high (12.5" x 12.5" x 11" to 19"), that includes the scope
Low weight, 75 lbs
Affordable price, especially when compared to stations with Mitutoyo or Motic scope
Ideal for probing with micron accuray on small high density wafers, 100 mm / 4" or less or bare die
Stage X/Y from front and side adjustable
Coarse adjustment of chuck theta
Backlash-free movement
2 year manufacturer warranty



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type: Compound
Focus block with coarse and fine adjustment
Trinocular erect image head with depolarizer
Quintuple nosepiece for objectives with 26 mm Mitutoyo thread
10X eyepieces
Plan APO 5x NA=0.13 WD=44.5 mm Metallurgical objective
Plan A

100 mm / 4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Platen allows placement of up to 5 large manipulators, or 4 more if using optional platen bars for other quadrants
Footprint: 320 x 320 mm (12.6" x 12.6")
Height with scope installed 485 mm or 19"
Net weight of base: 22 kg or 49 lbs

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