Probe Stations for 4 (100 mm) and smaller wafers, bare or as kit, with or without microscope.

Posted on May 25, 2015

Complete 100mm / 4in Probe Station kit with Meiji EMZ-5 scope, wide platen bars, 2 mid-size micropositioners, probe holders/tips

PSESPE4CWE5M     CAD8773  US$6934

MINI Probe Station kit for use with 100 mm / 4" or smaller wafers, wide platen bars, complete with Meiji EMZ-5 Stereo Zoom microscope with illumination, 1 pair of mid-size micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
Features:
Compact size, 320 wide x 320 deep x 460 mm high (12.5" x 12.5" x 18"), that includes the scope
Low weight, 58 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
Wide platen bars (50 x 80 mm)
2 year manufacturer warranty

$

6934

6490

4615

AUD

9122

Rs453479

363663 py6

CAD

8773

 

 

 

UAH 148175

CHF

 

7577

Exchange rates for prices in Euro, GBP, AUD, Rs, CAD, RUB, UAH were valid on posting date, will be adjusted to invoice date if necessary.
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Microscope:
type: Meiji Techno EMZ-5 binocular Stereo Zoom
0.7X - 4.5X zoom range
14X - 90X total magnification with 20X eyepieces
Working distance 93 mm
Focus block
Fluorescent illuminator and adapter from Meiji Techno

Optional: Platen bars for back a

Specifications:
100 mm / 4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Left and right platen allow placement of up to 6 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height with scope installed: 460 mm or 18.1"
Net weight of base: 17 kg or 38 lbs
2 platen bars 50 x 80 x 180 mm long

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