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FU kits, STANDARD RMS

[Meiji FUkits] [FU Focus Blocks] [Meiji FU3050] [Meiji FU1000]

 Posted on 7/9/09

 

Here are some examples of complete kits for use on small and mid-size or home grown Probe Stations.
ProbeMeiji Techno FU1000 focus block based micoscope scheme stations for small wafers (4” or less) typically come with a stereo microscope at very attractive cost and with extremely long working distance. That is fine for testing 4” wafers with feature sizes in the 10 µm range and above. But fine lines below 10 µm present a problem because of maximum available magnification to 150X or 200X with some severe degradation. Another problem is the illumination, typically with a fluorescent ring light.This solution has its drawbacks when viewing a shiny wafer surface.
A compound microscope with available magnifications up to 1000X or more and Koehler illumination with fiber optic light source eliminates these problems. But the industry standard, Mitutoyo’s Finescope FS70, cannot be justified from a pricing viewpoint for a small probe station under $5000. That is also true for Motic’s PSM- 1000, albeit to a lesser degree. There is a weight problem, too. Most small stations cannot support their weight without some flexing.
This MEIJI FU1000FU1000 based scope with quintuple DIN nosepiece series based solution is a much better match with pricing at $2500 and weight below 15 pounds. You can use the pole mount coming as standard with many small probe stations or you can bolt to a vertical surface as with the Mitutoyo FS70 or Motic PSM-1000. The hole pattern is not the same but we can supply an adapter or you can make one yourself.
The drawback is less working distance, 8 mm for the Meiji EPI 50X is somewhat tight but still workable. You will need to to use holders with spring clamping and cut off the probe tip shortly above the holder.
Or you can use a Mitutoyo or workalike objective with our adapters.
Image on the left shows a FU1000 based scope with monocular head and quintuple nosepiece. Can be pole mounted on a small probe station with low cost adapter.

Some
LWD NIR objectives come with DIN threading and do fit without adapter. Because of small disameter nosepiece designed for DIN objectives you can fit 2 of these only. The same applies to the use of our RMS to Mitutoyo adapters.
Monocular head pictured is low cost but shows non-erect image. If that is a problem then you would need to use a bi or trinocular erect image head.

 Please contact us with any questions.

Click cart for more info and to purchase kit.

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Description

Part # / Price

FU1010, Bin EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 50X EPI objective

FU1BED360550M      $3853

FU1010, Bin EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X EPI objective

FU1BED360520M      $3675

FU1010, Bin EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X EPI objective

FU1BED360520D      $5007

FU1000, Bin EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 50X EPI objective

FU0BED360550M      $3844

FU1000, Bin EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X EPI objective

FU0BED360520M      $3666

FU1000, Bin EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X EPI objective

FU0BED360520D      $4998

FU1010, Tri EI head, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, EPI 50X objectives2

FU1TE360550M       $3693

FU1010, Tri EI head, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, EPI 50X objective

FU1TE360520M       $3515

FU1010, Tri EI head, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, EPI 20X objective

FU1TE360520D       $4847

FU1010, Tri EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, EPI 20X objective

FU1TED360520D      $5185

FU1010, Tri EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, EPI 50X objective

FU1TE360550M       $3684

FU1010, Tri EI head with depolarizer, 2 x 10X comp. Eyepieces, illuminator, light source, 36in fiber optic guide, 5X, 20X EPI objective

FU1TE360520M       $3755

FU1010, Monocular head with 10X Eyepiece, illuminator, light source, 36in fiber optic guide, 5X, 50X EPI objective

FU1M360550M      $2918

FU1010, Monocular head with 10X Eyepiece, illuminator, light source, 36in fiber optic guide, 5X, 20X EPI objective

FU1M360520M      $2740

FU1010, Monocular head with 10X Eyepiece, illuminator, light source, 36in fiber optic guide, 5X and 20X EPI objective

FU1M360520D        $4064

FU1000, Monocular head with 10X Eyepiece, illuminator, light source, 36in guide, 5X, 50X objective

FU0M360550M      $2909

FU1000, Monocular head with 10X Eyepiece, illuminator, light source, 36in guide, 5X, 20X objective

FU0M360520M      $2731

FU1000, Monocular head with 10X Eyepiece, illuminator, light source, 36in guide, 10X, 50X EPI objective

FU0M361050M      $2948

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