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 Posted on 7/9/09

 

[5X Images] [10X Images] [20X Images] [50X Images] [50X1 Images] [50X Zoom/Compound]

[Magnification Table] [20X Motic ELWD] [20X Optem HR]

50X objective, part # OKHSL50: To check out the scope under realistic conditions we did acquire some surplus wafers in 6. The wafers turned out to be some test versions, maybe for setting up a production run. We will redo these images when we get hold of a wafer in a more finished state and with finer design rules.
The digital camera used is a Moticam 2500 with 5 Megapixel. The package did include all adapters needed for this project and then some, no additional parts necessary. All images were captured at 648 x 486. Then the color balance was optimized and the images were scaled down to 200 x 150.

Objective used: M Plan APO 50x NA=0.42 WD=20.5 mm Metallurgical objective.
The relatively low NA of 0.42 is an obstacle at high magnification.

Field of view through eyepieces versus actual size of acquired camera image:
We used 10X eyepieces (FN 20) and eyepiece micrometer (5 mm in 100 units, 0.05 mm per unit) plus reflective stage micrometer (1mm divided in 100 parts, 0.01 mm between line centers) to determine magnification.
Field of view through eyepieces versus actual size of acquired camera image:
By comparing feature size seen through the eyepieces with the captured image we did estimate the image size to be approximately 7.4 mm wide by 5 mm high.

 

Zoom setting / magnification when viewed through 10X eyepieces, magnification of captured images is higher!

Picture of stage micrometer (1 mm in 100 parts) taken at same zoom setting than image of wafer section at right. Distance between centers of any 2 lines is 10 m.

Resulting image of wafer area  after optimization of color balance and scaling to 200 x 150 pixels.

0.7X / 511X

Stage micrometer at 511X

50X objective, part # OKHSL50, 0.7 zoom, 511X magnification

1.0X / 714X

Stage micrometer at 714X

50X objective, part # OKHSL50, 1.0 zoom, 714X magnification

1.5X / 1075X

Stage micrometer at 1075X

50X objective, part # OKHSL50, 1.5 zoom, 1075X magnification

2.0X / 1383X

Stage micrometer at 1383X

50X objective, part # OKHSL50, 2.0 zoom, 1383X magnification

2.5X / 1775X

Stage micrometer at 1775X

50X objective, part # OKHSL50, 2.5 zoom, 1775X magnification

3.0X / 2100X

Stage micrometer at 2100X

50X objective, part # OKHSL50, 3.0 zoom, 2100X magnification

3.5X / 2475X

Stage micrometer at 2475X

50X objective, part # OKHSL50, 3.5 zoom, 2475X magnification

4.0 / 2900X

Stage micrometer at 2900X

50X objective, part # OKHSL50, 4.0 zoom, 2900X magnification

4.5X / 3250X

Stage micrometer at 3250X

50X objective, part # OKHSL50, 4.5 zoom, 3250X magnification

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